Design and fabrication of a very low peak voltage InGaAs/AlAs resonant tunneling diode incorporating a highly strained quantum well
Keywords:
InGaAs/AlAs, Quantum well, Resonant tunneling diode, THz sourcesAbstract
A highly strained quantum-well InGaAs/AlAs resonant tunneling diode (RTD), fabricated using molecular beam epitaxy (MBE) at a relatively low temperature of 430°C, demonstrated an exceptionally low peak voltage (VP) of approximately 0.23 V in the forward bias and 0.41 V in the reverse bias at room temperature. The atomic-scale control offered by MBE enabled precise layer growth, leading to an extremely low peak voltage along with high peak current densities of approximately 450 kA/cm2 and 790 kA/cm2 in the forward and reverse directions, respectively, mainly due to the exceptional interface quality and low series resistance. The MBE-fabricated RTD demonstrated superior scalability and reverse-bias performance compared to metal oxide vapor phase epitaxy-grown counterparts. Here, the process development of a submicrometer InGaAs/AlAs RTD was successfully achieved using standard photolithography, making it well suited for implementation in RTD-based terahertz (THz) sources that require low DC input power.
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Copyright (c) 2026 International Journal of Nanoelectronics and Materials (IJNeaM)

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