MOHD HAFIZ ISMAIL; BIBI NADIA TAIB; SHAZLINA JOHARI; HASNIZAH ARIS; LINDA SILVIA. Investigation of Material and Structural Effects on MEMS Thermal Sensor Characteristic. International Journal of Nanoelectronics and Materials (IJNeaM) , [S. l.], v. 19, n. June, p. 193–200, 2026. DOI: 10.58915/ijneam.v19iJune.3390. Disponível em: https://ejournal.unimap.edu.my/index.php/ijneam/article/view/3390. Acesso em: 16 jul. 2026.