NATASYA SALSABIILA; NAFARIZAL NAYAN; ZULKIFLI AZMAN; NUR AQILAH SAIDON; AHMAD SHUHAIMI ABU BAKAR; MOHD ROFEI MAT HUSIN; MOHD YAZID AHMAD; JIBRIL ALHAJI YABAGI; FERY ADRIYANTO. Correlation of Target and Substrate Rotation Speeds on the Growth of Aluminum Nitride Thin Film Using an Industrial-Grade Sputtering System. International Journal of Nanoelectronics and Materials (IJNeaM) , [S. l.], v. 18, n. December, p. 39–48, 2025. DOI: 10.58915/ijneam.v18iDecember.2806. Disponível em: https://ejournal.unimap.edu.my/index.php/ijneam/article/view/2806. Acesso em: 31 dec. 2025.