ILLIANA KHALIDA MOHD SHUKRI; HASNIZAH ARIS; NURUL IZZA MOHD NOR; MOHD HAFIZ ISMAIL; NAZUHUSNA KHALID; WAN MOKHDZANI WAN NORHAIMI; ZALIMAN SAULI; ANEES ABDUL AZIZ. Design and simulation of a high-sensitivity MEMS capacitive pressure sensor. International Journal of Nanoelectronics and Materials (IJNeaM) , [S. l.], v. 18, n. 4, p. 593–599, 2025. DOI: 10.58915/ijneam.v18i4.2657. Disponível em: https://ejournal.unimap.edu.my/index.php/ijneam/article/view/2657. Acesso em: 7 nov. 2025.