H. ARIS; MUHAMMAD NIZAM ROSLI; M. N. M. NUZAIHAN; Z. SAULI; W. M. W. NORHAIMI. Simulation and Investigation of Si-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Performances. International Journal of Nanoelectronics and Materials (IJNeaM) , [S. l.], v. 16, n. 3, p. 695–704, 2024. DOI: 10.58915/ijneam.v16i3.1336. Disponível em: https://ejournal.unimap.edu.my/index.php/ijneam/article/view/1336. Acesso em: 23 nov. 2024.