Natasya Salsabiila, Nafarizal Nayan, Zulkifli Azman, Nur Aqilah Saidon, Ahmad Shuhaimi Abu Bakar, Mohd Rofei Mat Husin, … Fery Adriyanto. (2025). Correlation of Target and Substrate Rotation Speeds on the Growth of Aluminum Nitride Thin Film Using an Industrial-Grade Sputtering System. International Journal of Nanoelectronics and Materials (IJNeaM) , 18(December), 39–48. https://doi.org/10.58915/ijneam.v18iDecember.2806