N. I .M. Nor et al. 2023. Analysis of Different Piezoelectric Materials on the Film Bulk Acoustic Wave Resonator . International Journal of Nanoelectronics and Materials (IJNeaM) . 16, December (Dec. 2023), 121–130. DOI:https://doi.org/10.58915/ijneam.v16iDECEMBER.398.