Roer Eka Pawinanto et al. 2026. Characteristics prediction of sub-5 nm nanosheet field effect transistor (FET) using a machine learning approach. International Journal of Nanoelectronics and Materials (IJNeaM) . 19, 2 (Apr. 2026), 269–275. DOI:https://doi.org/10.58915/ijneam.v19i2.3105.