Phey Yee Foong et al. 2025. Unintended Catalysis and Defect Formation in Electroless Metallization of Semiconductor Wafers. International Journal of Nanoelectronics and Materials (IJNeaM) . 18, December (Dec. 2025), 151–159. DOI:https://doi.org/10.58915/ijneam.v18iDecember.2823.